{
  "id": "lib-process:nanotechnology--thin-film-deposition",
  "_kind": "LibraryProcess",
  "_file": "generated-library/processes.yaml",
  "_cluster": "generated-library",
  "attributes": {
    "displayName": "specializations/domains/science/nanotechnology/thin-film-deposition",
    "description": "Thin Film Deposition Process Optimization - Optimize thin film deposition processes\n(ALD, CVD, PVD) for nanoscale films including precursor delivery, substrate temperature,\nfilm thickness control, conformality validation, and material property characterization\nwith statistical process control implementation.",
    "libraryPath": "library/specializations/domains/science/nanotechnology/thin-film-deposition.js",
    "specialization": "nanotechnology",
    "references": [
      "- Atomic Layer Deposition: An Overview: https://pubs.acs.org/doi/10.1021/cr900056b",
      "- Chemical vapor deposition (CVD) for nanotechnology: https://www.sciencedirect.com/topics/materials-science/chemical-vapor-deposition",
      "- Molecular Beam Epitaxy (MBE): https://www.veeco.com/products/mbe-systems"
    ],
    "example": "const result = await orchestrate('specializations/domains/science/nanotechnology/thin-film-deposition', {\n  depositionMethod: 'ALD',\n  material: 'Al2O3',\n  targetThickness: { value: 10, units: 'nm', tolerance: 0.5 },\n  substrate: 'silicon',\n  requirements: { conformality: 0.95, temperatureLimit: 300 }\n});",
    "usesAgents": [
      "thin-film-engineer",
      "precursor-specialist",
      "thermal-process-engineer",
      "process-optimizer",
      "deposition-technician",
      "conformality-analyst",
      "film-characterization-scientist",
      "spc-engineer",
      "qualification-engineer",
      "technical-writer"
    ]
  },
  "outgoingEdges": [
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      "from": "lib-process:nanotechnology--thin-film-deposition",
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      "kind": "lib_requires_skill_area",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
      "to": "skill-area:physics-simulation",
      "kind": "lib_requires_skill_area",
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        "weight": 0.7
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
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        "weight": 0.5
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
      "to": "domain:nanotechnology",
      "kind": "lib_applies_to_domain",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
      "to": "role:research-engineer",
      "kind": "lib_involves_role",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
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      "kind": "lib_implements_workflow",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
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        "weight": 0.9
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    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
      "to": "lib-agent:nanotechnology--thin-film-engineer",
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        "weight": 0.8
      }
    },
    {
      "from": "lib-process:nanotechnology--thin-film-deposition",
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      "kind": "uses_agent",
      "attributes": {
        "weight": 0.8
      }
    }
  ],
  "incomingEdges": []
}